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Technische Universität Dresden
Institut für Halbleiter- und Mikrosystemtechnik (IHM)

Address Nöthnitzer Straße 64
01187 Dresden
Deutschland

GERiT This institution in GERiT

01187 Dresden

Projects

Research Grants
- Current projects
  - Controllable membrane system
    (Applicants Richter, Andreas ; Wallmersperger, Thomas )
  - Fun2D+ | 3D functional mesoscopic system based on 2D materials
    (Applicants Albert, Matthias ; Kirchner, Robert )
  - Modulation-Acceptor Doping of SiO2 as Novel Doping Method for Silicon Nanowires (MADSiNano)
    (Applicants Hiller, Daniel ; Mikolajick, Thomas )
  - Polymer Networks as Carrier for Organo Catalysts within Continuously Driven Microfluidic Reactor Systems
    (Applicant Kuckling, Dirk )
  - Wurtzite Solid Solutions as a New Material Class for Ferroelectric Microelectronics
    (Applicants Fichtner, Simon ; Mikolajick, Thomas )
- Completed projects
  - 3DFold - Programmed folding of mesoscopic 3D objects by viscoelastic reconfiguration
    (Applicant Kirchner, Robert )
  - Elektrochemische Präparation von Diffusionsbarrieren für Mehrmetallschichten und ihr Verhalten bei der Fremdmetalldiffusion
    (Applicant Drescher, Kurt )
  - Ferroelectric Hafnium Oxide Material Enhanced Reliability
    (Applicant Mikolajick, Thomas )
  - Ferroelectric zirconium oxide for piezo- and pyroelectric devices (Zeppelin)
    (Applicants Böttger, Ulrich ; Kersch, Alfred ; Mikolajick, Thomas )
  - Herstellung und Charakterisierung von Niobpentoxid-Schichten mit schaltbarer elektrischer Leitfähigkeit
    (Applicants Mikolajick, Thomas ; Rafaja, David )
  - Hydrogelbasierte Mikrofluidik-Prozessoren
    (Applicant Richter, Andreas )
  - Impedanz- und elektroakustische Spektroskopie an keramischen Ultra- und Nanofiltrationsmembranen
    (Applicant Mikolajick, Thomas )
  - Incipient ferroelectrics based on hafnium oxide
    (Applicants Böttger, Ulrich ; Kersch, Alfred ; Mikolajick, Thomas )
  - Large-scale integrated microfluidic circuits based on intrinsically active polymers
    (Applicant Richter, Andreas )
  - Locally active memristive data processing (LAMP)
    (Applicants Mikolajick, Thomas ; Tetzlaff, Ronald )
  - Low-Voltage High-Frequency Vertical Organic Transistors
    (Applicants Bartha, Johann-Wolfgang ; Ellinger, Frank ; Leo, Karl )
  - MEMS LMIS Chips: Investigation of Wetting and Operational Stability of Liquid Metal Ion Sources based on Glass Substrates
    (Applicant Tajmar, Martin )
  - New wide-gap semiconductor materials for opto-electronics and for fundamental research
    (Applicant Mikolajick, Thomas )
  - Optoelektronische Ansteuerung für hochintegrierte MEMS auf Polymerbasis
    (Applicant Richter, Andreas )
  - PARFAIT II: Power-aware AmbipolaR Fpga ArchITecture II
    (Applicants Becker, Jürgen ; Hofmann, Klaus ; Mikolajick, Thomas )
  - PlasCode - Plasmonic Coding in Smart Mesoscopic Particles for Dynamic Detection in Fluid Flows
    (Applicants Kirchner, Robert ; Zimmer, Klaus )
  - Quantum-mechanical device concepts including ultra-thin functional ALD-films for terahertz applications
    (Applicants Bartha, Johann-Wolfgang ; Wenger, Christian )
  - Role of Carbon on the electrical, optical and structural properties of GaN
    (Applicant Mikolajick, Thomas )
  - Sound sources based on dielectric elastomers
    (Applicants Altinsoy, Ercan ; Richter, Andreas )
  - Spin Orbit functionalized GRAPHene for resistive-magnetic MEMories
    (Applicants Blügel, Stefan ; Mikolajick, Thomas )
Research Units
- Completed projects
  - Bauteilintegrierte Sensorik und Risserkennung in CF-PEEK-Hochleistungsrotoren
    (Applicant Pfeifer, Günther )
  - Zentrale Organisation und Verwaltung
    (Applicant Hufenbach, Werner )
Priority Programmes
- Current projects
  - Biomimetic robots autonomously driven by dielectric elastomers (BROADCAST)
    (Applicants Kraus, Tobias ; Marschner, Uwe ; Vorrath, Ernst-Friedrich Markus )
  - Cooperative elastomeric multi-actuator platform (CALMAR)
    (Applicants Maas, Jürgen ; Marschner, Uwe ; Richter, Andreas ; Vorrath, Ernst-Friedrich Markus )
  - Elastic couplings with integrated flexible dielectric elastomer sensors
    (Applicants Schlecht, Berthold ; Vorrath, Ernst-Friedrich Markus ; Wallmersperger, Thomas )
  - Neurotransistor-based Memristive Crossbar Memcomputing (NeuroMCross)
    (Applicants Mikolajick, Thomas ; Slesazeck, Stefan ; Tetzlaff, Ronald )
  - SecuReFET II: Secure Circuits through inherent Reconfigurable FET II
    (Applicants Kumar, Akash ; Mikolajick, Thomas )
- Completed projects
Heisenberg Professorships
- Completed projects
  - Polymere Mikrosysteme
    (Applicant Richter, Andreas )
Heisenberg Fellowships
- Completed projects
  - Integrierte und hochintegrierte mikrotechnische Systeme
    (Applicant Richter, Andreas )
  - M3SR: Mesoscopic 3D-structure formation via controlled viscous reconfiguration
    (Applicant Kirchner, Robert )
Heisenberg Grants
- Completed projects
  - M3SR: Mesoscopic 3D-structure formation via controlled viscous reconfiguration
    (Applicant Kirchner, Robert )
Collaborative Research Centres
- Completed projects
  - Adaption polymerer Schichten und Gele an Halbleiter- und Mikrostrukturen, Charakterisierung aktorischer und sensorischer Eigenschaften
    (Project Head Drescher, Kurt )
  - Integrated wireless sensor networks
    (Project Heads Fischer, Wolf-Joachim ; Starke, Eric )
  - Phasen- und Strukturbildungsphänomene in Metall-Perowskit-Schichtsystemen
    (Project Heads Bartha, Johann-Wolfgang ; Schönecker, Andreas )
  - Polymere als Zwischenebenenisolatoren in Mehrebenenmetallisierungssystemen
    (Project Heads Meusel, Ekkehard ; Wenzel, Christian )
  - Reaktions- und Diffusions-Phänomene in Cu-WTi-SiO2-Schichtsystemen
    (Project Head Drescher, Kurt )
  - Reaktive Schichten auf der Basis leitfähiger Polymere und deren Anwendung
    (Project Heads Dunsch, Lothar ; Fischer, Wolf-Joachim ; Plieth, Waldfried ; Rammelt, Ursula )
  - Reaktive Silane und Thiole zur Herstellung von Self-Assembly-Schichten, deren Strukturierung und Applikation in der Mikroelektronik und Mikrosystemtechnik
    (Project Head Drescher, Kurt )
Major Research Instrumentation
- Completed projects
Independent Junior Research Groups
- Current projects
  - Multifunctional dielectric elastomer electronics for next generation soft robotics
    (Applicant Vorrath, Ernst-Friedrich Markus )
CRC/Transregios
- Completed projects
  - High-volume production technologies for glass fibre-reinforced polyurethane composite structures with integrated piezoceramic sensor elements and adapted electronics
    (Project Heads Fischer, Wolf-Joachim ; Gude, Maik )
Research Training Groups
- Current projects
  - GRK 2767: Supracolloidal Structures: From Materials to Optical and Electronic Devices
    (Spokesperson Fery, Andreas )
- Completed projects
  - GRK 51: Sensor Technology
    (Spokesperson Gerlach, Gerald )
  - GRK 1401: Nano- and Biotechniques for Electronic Device Packaging
    (Spokesperson Gerlach, Gerald )
  - GRK 1865: Hydrogel-based Microsystems
    (Spokesperson Gerlach, Gerald )
Clusters of Excellence
- Completed projects
  - EXC 1056: Center for Advancing Electronics Dresden (cfAED)
    (Spokesperson Fettweis, Gerhard P. )

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