Project Details
Projekt
GRK 1215: Materials and Concepts for Advanced Interconnects
Subject Area
Systems Engineering
Term
from 2006 to 2015
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 883210
Continuously shrinking geometric dimensions of semiconductor devices and the progressive approach to fundamental physical limitations are calling for novel materials, sophisticated analysis techniques and advanced manufacturing processes that must be applicable to industrial mass production. The International Research Training Group, therefore, treats the tremendous challenges related to the formation of the electrical interconnects between single transistors as well as functional blocks to form a complex metallisation system on a single microchip. Aspects of silicide contacts and new ultrathin dielectrics at the interface to the active device level, the transistors, and for the packaging of highly integrated electronic circuits are considered as well.
The research work will be performed in the fields of new material development, advanced processes and technologies, process and material interactions, integration aspects, material and test structure characterisation, as well as process and interconnect modelling and simulation.
Activities include both fundamental and applied research, as well as reliability and interconnect scaling issues, and the evaluation of manufacturing-worthy advanced materials. Highlighting links between basic materials properties, their characteristics in nanostructures, technological aspects of materials and their applications is a major objective of the programme. Additionally, novel concepts related to new device approaches such as carbon nanotubes or molecular electronics will be considered.
A study programme comprising lectures, seminars, and laboratory courses, which are specially tailored to the topic of the International Research Training Group, accompanies the research activities. Another essential cornerstone of the project is the exchange of PhD students with the partner universities Shanghai Jiao Tong University and Fudan University (Shanghai). Besides strengthening the scientific contacts, this is also going to enhance the intercultural competencies of the young scientists.
The research work will be performed in the fields of new material development, advanced processes and technologies, process and material interactions, integration aspects, material and test structure characterisation, as well as process and interconnect modelling and simulation.
Activities include both fundamental and applied research, as well as reliability and interconnect scaling issues, and the evaluation of manufacturing-worthy advanced materials. Highlighting links between basic materials properties, their characteristics in nanostructures, technological aspects of materials and their applications is a major objective of the programme. Additionally, novel concepts related to new device approaches such as carbon nanotubes or molecular electronics will be considered.
A study programme comprising lectures, seminars, and laboratory courses, which are specially tailored to the topic of the International Research Training Group, accompanies the research activities. Another essential cornerstone of the project is the exchange of PhD students with the partner universities Shanghai Jiao Tong University and Fudan University (Shanghai). Besides strengthening the scientific contacts, this is also going to enhance the intercultural competencies of the young scientists.
DFG Programme
International Research Training Groups
International Connection
China
Applicant Institution
Technische Universität Chemnitz
Participating Institution
Fraunhofer-Institut für Elektronische Nanosysteme (ENAS)
IRTG-Partner Institution
Fudan University; Shanghai Jiao Tong University
Spokesperson
Professor Dr. Thomas Geßner (†)
Participating Researchers
Professor Dr. Manfred Albrecht; Professor Dr. Michael Hietschold; Professor Dr. Heinrich Lang; Professor Dr. Thomas Otto; Professor Dr.-Ing. Herbert Reichl; Professor Dr. Oliver G. Schmidt; Professor Dr.-Ing. Stefan E. Schulz; Professor Dr. Dietrich R. T. Zahn
IRTG-Partner: Spokesperson
Professor Dr. Ran Liu
Cooperation Partners
Professor Dr. Wen-bin Cai; Professor Dr. Di Chen; Professor Dr. Shi-jin Ding; Professor Dr. Jie Feng; Professor Ruan Gang; Professor Dr. Shouwu Guo; Professor Dr. Yongfeng Mei; Professorin Dr. Xin-ping Qu; Professor Dr. Guo-Ping Ru; Professor Dr. Xuejian Yan; Professor Dr. Zhi Yang; Professor Dr. Huang Yiping; Professor Dr. Yafei Zhang; Professor Dr. Wei Zhang; Professorin Dr. Jia Zhou; Professor Dr. Guodong Zhu
