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Projekt Druckansicht

GRK 1215:  Materialien und Konzepte für fortschrittliche Metallisierungssysteme

Fachliche Zuordnung Systemtechnik
Förderung Förderung von 2006 bis 2015
Projektkennung Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 883210
 
Erstellungsjahr 2015

Zusammenfassung der Projektergebnisse

The reported IRTG was a joint International PhD program between the Faculty of Natural Sciences and the Faculty of Electrical Engineering and Information Technology of Chemnitz University of Technology, Berlin Technical University, the Fraunhofer Institute for Reliability and Microintegration (IZM) Berlin, the Fraunhofer Institute for Electronic Nano Systems (ENAS) Chemnitz, as well as two Chinese universities, the Fudan University, Shanghai and the Shanghai Jiao Tong University. Continuously shrinking dimensions of semiconductor devices and the progressive approach to fundamental physical limitations are calling for novel materials, sophisticated analysis techniques and advanced manufacturing processes applicable to industrial mass production. The International Research Training Group "Materials and Concepts for Advanced Interconnects and Nanosystems" therefore treated the tremendous challenges related to the formation of the electrical interconnects between single transistors as well as between functional blocks or stacked dies to form complex metallization systems on a single chip or in a multi-chip stack. Moreover nanostructures and nanomaterials were the focus of the scientific work. The research work was performed in the fields of new material development, advanced processes and technologies, process and material interactions, integration aspects, material and test structure characterization, and material, process, and device modelling/simulation. Activities included both fundamental and applied research, as well as reliability and interconnect scaling issues, and the evaluation of manufacturing-worthy advanced materials and nanoscale devices. Highlighting links between basic materials properties, their characteristics in nanostructures, technological aspects of materials and their applications was a major objective of the program. Additionally, novel concepts related to new device approaches such as magnetic nanostructures or nanostructures for energy storage were investigated. The multidisciplinarity of this project enabled a really fruitful cooperation between the PhD students. A case in point is the cooperation between the PhD students in chemistry and the students who developed atomic layer deposition processes. With a new Cu-precursor, developed from the chemist, a new atomic layer deposition process for CuOx could be developed with a following reduction step to pure Cu. This resulted in a patent. Nevertheless, the precursor have been further improved with the experience from the deposition experiments. It was seen, that the CuOx layer was reduced more effective when it deposited onto Ru layer. So a small amount of Ru has been added to the Cu precursor like a catalytic effect for better reduction. This work resulted also in a patent. Strong collaboration existed also between the students for simulation and modelling and the students who worked with Carbon nano tubes (CNTs). Here, the conclusion didn't have direct influence on the experimental work, but the understanding of the experimental results could be improved. A really important result of simulation was the comprehension of the electron transfer between the CNT and the metallic pad, and which metals are better suitable as metallic pad for higher electron transfer. Further students worked rather on fundamental subjects, like the mechanical description of materials as thin films by nanoindentation. The evaluation of mechanical properties of thin layers, especially in a multi-layer structure, poses challenges. The works in this topic contributed to a deep understanding which stylus form and parameters (forces and normal / lateral loads) leads to different intrinsic stress fields in the layers and how you could extract the mechanical film properties from these data. In the renewal proposal the topic was extended to nano-systems which address the energy storage or energy generation in smart systems. On one hand side rolled up nanostructures were investigated as electrode materials in lithium ion batteries which can be directly fabricated on wafer level. On the other hand side one project dealt with thermoelectricity, where polymer systems with embedded nanostructures should increase the Seebeck coefficient for higher power factor. In conclusion, the key goal of the research programme of the IRTG was to perform high-quality research to make substantial contributions for solving the challenges of future integrated circuit development and fabrication in selected fields with focus on interconnect systems and nanosystems.

Projektbezogene Publikationen (Auswahl)

 
 

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