SFB 622:  Nanopositioning- and Nanomeasuring Machines

• Subject Area: Mechanical and Industrial Engineering ; Computer Science, Systems and Electrical Engineering ; Materials Science and Engineering
• Term: from 2002 to 2013
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5485337

In the collaborative research centre 622 "Nanopositioning- and Nanomeasuring Machines" the scientific-technical foundations to the design and to the realisation of nanopositioning- and nanomeasuring machines are developed. These machines make possible the positioning, measurement, touch and processing of objects with nanometer-accuracy. They will be used on future-orientated technologies and techniques (semiconductor technique, extreme UV-, electronic beam and X-ray lithography, nanoimprinting lithography, nanostructuring, nanofabrication, waferlevel-testing, micromechanik, crystallography, mineralogy but also bio- and gene-engineering) and will carry out technical, technological and analytical operations with highest precision and dynamics. In this case the major challenges of the collaborative research centre consist in demands for ever larger positioning areas with extreme accuracy and dynamic. Novel probe systems and nanotools (workingtools) have to be integrated in the machines.

• DFG Programme: Collaborative Research Centres

Completed projects

• A01 - metrology of NPM-machines (Project Heads Füßl, Roland ;  Manske, Eberhard )
• A02 - Nano measuring technique (Project Heads Hausotte, Tino ;  Manske, Eberhard )
• A3 - Lithografie-Nanotools (Project Heads Doll, Theodor ;  Schwierz, Frank )
• A05 - Nanopositioning Systems for Large Travel Ranges (Project Heads Sattel, Thomas ;  Schäffel, Christoph )
• A07 - Methoden zum Steuerungs- und Regelungsentwurf bei Nanopositionier- und -messmaschinen (Project Head Sawodny, Oliver )
• A08 - Multifunktionale Nanoanalytik mit einem in die Nanopositionier- und Messmaschine integrierten Kraftmikroskop (AFM/NPM-Maschine) (Project Head Ambacher, Oliver )
• A09 - Durchgängiger Entwurf von modellbasierten Regelungen für Nanopositionier- und Nanomessmaschinen (Project Head Ament, Christoph )
• A11 - High-dynamic nanopositioning for small areas (Project Head Rangelow, Ivo W. )
• A12 - Integration of multifunctional nanoanalytic (Project Head Hoffmann, Martin )
• B01 - Modellgestützte Analyse und Optimierung des dynamischen Verhaltens von Nanopositionier- und Nanomessmaschinen (Dynamik von NPM-Maschinen) (Project Head Zimmermann, Klaus )
• B02 - Mechanical Design of NPM-Maschines (Project Heads Theska, René ;  Weber, Christian )
• B03 - Materials and Surfaces (Project Heads Kern, Heinrich ;  Schaaf, Peter ;  Spieß, Lothar )
• B04 - Glasbauteile für NPM-Maschinen (Project Heads Harnisch, Alf ;  Hülsenberg, Dagmar )
• B05 - Tribological Properties (Project Heads Ahmed, Syed Imad-Uddin ;  Scherge, Matthias )
• B07 - Nanotools for NPM-Machines (Project Heads Hoffmann, Martin ;  Sinzinger, Stefan )
• C01 - Hochleistungsinformationsverarbeitung mit eingebetteten Systemen (Project Head Fengler, Wolfgang )
• C02 - Sensornahe Messdatenerfassung und -verarbeitung (Project Head Franke, Karl-Heinz )
• C03 - Visualisierung und Teleservice (Project Head Weiß, Mathias )
• C04 - Ergonomische Gestaltung nanotechnischer Systembereiche (Project Head Kurtz, Peter )
• C05 - Design- and knowledge-based inspection planning for the quality assurance of micro- and nano-scaled components (Project Head Linß, Gerhard )
• C06 - Modelbased Controldesign for Nanopositioning and Nanomeasuring Machines (Project Head Ament, Christoph )
• MGK - Integrated Research Training Group (Project Heads Manske, Eberhard ;  Theska, René )
• T01 - Metrologische Verifikation (Project Heads Füßl, Roland ;  Grünwald, Rainer )
• T02 - Konstruktion, Aufbau und Erprobung der Maschine (Project Heads Jäger, Gerd ;  Manske, Eberhard ;  Theska, René )
• T03 - Signalverarbeitung und Systemsteuerung (Project Heads Ament, Christoph ;  Fengler, Wolfgang ;  Li, Pu )
• Z - Zentrale Aufgaben für den SFB (Project Heads Augustin, Silke ;  Manske, Eberhard )

• Applicant Institution: Technische Universität Ilmenau
• Participating Institution: IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH
• Spokesperson: Professor Dr.-Ing. Eberhard Manske