SPP 1157:  Integrated Electroceramic Functional Structures

• Subject Area: Materials Science and Engineering
• Term: from 2003 to 2010
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5471984

Integrated electroceramic functional structures represent a pre-stage of innovative, complex, electronic devices or systems, receiving a new functionality or enhanced properties by a new combination of materials and/or functions. The meaning of integration is the process-related merging of electroceramics with other materials or functional units on the micrometer or nanometer scale. These other materials could be ceramics again or metals, semiconductors, glasses, polymers, organic compositions or bio-materials. Integration should be achieved on silicon, other semiconductors or oxide wafers. The functional structures are addressed to pure electronic read-out functions (sensors) or to electronically controlled functions (actors). The aim of the functional structure is, on the one hand, to demonstrate the operation principle and, on the other hand, to obtain a deeper understanding of the physical-chemical mechanisms of the functions and their integration processes. The Priority Programme aims at projects within the following areas:-- New functions being not yet integrated in microelectronic or MEMS chips or exhibiting a new functionality. New device concepts as well as realisations of devices in order to explain the microscopic mechanisms or processes should also be funded. -- New materials showing significantly improved properties for certain functions or having not been integrated in thin film systems yet. These investigations should be focused on the scientific understanding of the functionality of the material under the specific process conditions. -- New technologies having not been used for the integration of electroceramic oxides yet or having not been the object of research. New methods of thin film deposition and structuring as well as nano-technological methods and manipulation by SPM can be addressed. It has to become clear in which way the new technology will improve the integration process or the device performance.

• DFG Programme: Priority Programmes

Projects

• Ab-initio calculation of energy barriers and electronic structures at interfaces in electroceramic thin-film systems (Applicant Elsässer, Christian )
• Anorganische Hybridsysteme als Funktionsstrukturen für die integrierte Optoelektronik (Applicant Brütting, Wolfgang )
• Development of piezoelectric AlGaN/Si-nanoresonators for high frequency electroceramic sensors which can be integrated into semi-conductor devices (Applicant Ambacher, Oliver )
• Electrically switchable integrated magneto-optic functionalized structures (Applicant Stritzker, Bernd )
• Elektrokeramische mikroelektromechanische Schaltelemente (MEMS) für die Hochfrequenztechnik (Applicants Böttger, Ulrich ;  Klein, Norbert )
• Elektrokeramische mikroelektromechanische Schaltelemente (MEMS) für die Hochfrequenztechnik (Applicant Böttger, Ulrich )
• Ferroelektrische Einzeldomänen und ferroelektrische Tunnelelemente (Applicant Müller, Paul )
• Herstellung und komplexe Charakterisierung von Metall-Keramik-Verbundschichten (Applicant Kern, Heinrich )
• Highly selective hydrocarbon gas sensors using zeolites (Applicant Moos, Ralf )
• In-situ Experimente im Transmissionselektronenmikroskop zu den Mechanismen des resistiven Schaltens in Oxiden für nicht-flüchtige Datenspeicher (Applicant Schröder, Herbert )
• Integrierte hoch-selektive keramische Kohlenwasserstoff-Gassensoren auf Zeolith-Basis (Applicants Fischerauer, Gerhard ;  Moos, Ralf )
• Koordinierungsaufgaben im Schwerpunktprogramm "Integrierte elektrokeramische Funktionsstrukturen" (Applicant Waser, Rainer )
• Monolithische Integration photonischer Bauelemente auf der Basis der Flüssigphasenepitaxie (Applicant Ruske, Jens-Peter )
• Neue funktionale Schichtsysteme auf der Basis künstlicher heteroepitaktischer Mehrlagenstrukturen aus Übergangsmetalloxiden (Applicant Mader, Werner )
• Neue funktionale Schichtsysteme auf der Basis künstlicher heteroepitaktischer Mehrlagenstrukturen aus Übergangsmetalloxiden (Applicants Gross, Rudolf ;  Mader, Werner )
• Organische Ferroelektrika für nichtflüchtige Speicher (Applicant Schmeißer, Dieter )
• Piezoelektrische mikro-elektromechanische Systemkomponenten und Sensorsysteme in Langasit für Hochtemperaturanwendungen (Applicants Fritze, Holger ;  Schmidt, Bertram )
• Piezoelektrische mikro-elektromechanische Systemkomponenten und Sensorsysteme in Langasit für Hochtemperaturanwendungen (Applicant Schmidt, Bertram )
• Polarisation induced surface functionality of ferroelectrics (Applicants Eng, Lukas M. ;  Seifert, Gotthard )
• Polarisationsinduzierte Oberflächenfunktionalität an Ferroelektrika (Applicant Seifert, Gotthard )
• Pr - O - N layers: dielectrics for 4H-SiC surfaces (Applicant Schmeißer, Dieter )

• Spokesperson: Professor Dr.-Ing. Rainer Waser