Massensensitive Dünnschichtscherwellenresonatoren basierend auf neuartigen, MOVPE gewachsenen, Piezoelektrischen GaN Schichten

• Applicants: Professor Dr. Alois Krost (†); Professor Dr. Leonhard Michael Reindl
• Subject Area: Microsystems
• Term: from 2007 to 2010
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 52753275

• Final Report Year: 2010

Final Report Abstract

No abstract available

Publications

• „Reduced Order Finite Element Models of Bulk Acoustic Wave Resonators“, IEEE Ultrasonics Symposium, pp.2123-2128, 2009
  P. Katus and L. Reindl
  
• „Piezoelectric Sensor Arrangement Comprising a Thin Layer Shear Wave Resonator Based on Epitactically Grown Piezoelectric Layers“, Pat.No. 20100127600, 05.27.2010
  A. Dadgar, M. Loschonsky and L. Reindl