Positioniersystem (A 5)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 1998 to 2001
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5479322

No abstract available

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 379: Micromechanical Sensor and Actuator Arrays
• Applicant Institution: Technische Universität Chemnitz
• Project Heads: Professor Dr.-Ing. Michael Dietzsch; Professor Dr.-Ing. Wolfram Dötzel; Professor Dr. Thomas Geßner (†); Professor Dr.-Ing. Wolfgang Manthey