Local confined laser-induced plasmas for direct writing of low damage patterns by precise reactive etching

• Applicant: Dr.-Ing. Klaus Zimmer
• Subject Area: Synthesis and Properties of Functional Materials
• Term: from 2018 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 392226212

• Final Report Year: 2023

Final Report Abstract

No abstract available

Publications

• "Laser-induced reactive microplasma for etching of fused silica," Applied Physics a-Materials Science & Processing 126 (11), 9 (2020)
  M. Ehrhardt, P. Lorenz, B. Han et al.
  (See online at https://doi.org/10.1007/s00339-020-04019-x)
• "Dry Etching of Germanium with Laser-Induced Reactive Micro Plasma," Lasers in Manufacturing and Materials Processing (2021)
  Martin Ehrhardt, Pierre Lorenz, Jens Bauer et al.
  (See online at https://doi.org/10.1007/s40516-021-00147-1)
• "Dry etching of monocrystalline silicon using a laserinduced reactive micro plasma," Applied Surface Science Advances 6, 100169 (2021)
  Robert Heinke, Martin Ehrhardt, Pierre Lorenz et al.
  (See online at https://doi.org/10.1016/j.apsadv.2021.100169)
• "Dynamics and 2D temperature distribution of plasma obtained by femtosecond laser-induced breakdown," J. Phys. D 55 (12), 125204 (2021)
  Afaque M. Hossain, Martin Ehrhardt, Martin Rudolph et al.
  (See online at https://doi.org/10.1088/1361-6463/ac42f8)
• "Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas," Ceramics International (2021)
  Klaus Zimmer, Martin Ehrhardt, Pierre Lorenz et al.
  (See online at https://doi.org/10.1016/j.ceramint.2021.09.084)
• "Low surface damage laser processing of silicon by laserinduced plasma etching (LIPE)," Appl. Surf. Sci. 597, 153712 (2022)
  Robert Heinke, Martin Ehrhardt, Jens Bauer et al.
  (See online at https://doi.org/10.1016/j.apsusc.2022.153712)
• "Ultrahigh Precision Machining of Polymer Surface using Laser-Induced Reactive Micro-Plasmas," J. Laser Micro/Nanoeng. 17 (1), 28-34 (2022)
  Leon Streisel, Martin Ehrhardt, Pierre Lorenz et al.
  (See online at https://doi.org/10.2961/jlmn.2022.01.2005)
• Time- and Position- Dependent Breakdown Volume Calculations to Explain Experimentally Observed Femtosecond Laser- Induced Plasma Properties, ACS Photonics (2023)
  A.M. Hossain, M. Ehrhardt, M. Rudolph, P. Lorenz, D. Kalanov, K. Zimmer, A. Anders
  (See online at https://doi.org/10.1021/acsphotonics.2c00746)
• Ultraprecise surface processing by etching with laser-induced plasmas, in: R. Stoian, J. Bonse (Eds.) Ultrafast Laser Nanostructuring, Springer Cham, ISBN: 978-3-031-14751-7, 2023, pp. XXI, 1220
  M. Ehrhardt, P. Lorenz, K. Zimmer
  (See online at https://doi.org/10.1007/978-3-031-14752-4_18)