PACVD-Synthese und Charakterisierung von Si/(B)/C/N-Hartstoffschichten für tribologische Anwendungen

• Applicant: Professor Dr. Herbert Stafast
• Subject Area: Chemical and Thermal Process Engineering
• Term: from 2001 to 2006
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5313838

No abstract available

• DFG Programme: Priority Programmes
• Subproject of: SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes
• Participating Persons: Privatdozent Dr. Fritz Falk; Professor Ralf Riedel