scanning electron microscope with energy dispersive X-ray spectroscopy

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: Funded in 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 512651364

The proposed major research instrumentation, the scanning electron microscope with energy-dispersive X-ray spectroscopy, will allow the analysis of morphology and elemental composition of plasma-treated or plasma-deposited materials. Device with fast sample exchange and easy operation is explicitly aimed for here to allow material analysis on the daily basis and from PhD candidates without an advanced level training. The routine tasks with the scanning electron microscope will be the analysis of the material surface morphology and its changes after plasma treatment, the determination of size of nano- and microparticles, or the measurements of thickens of material or nanoparticle layers on the substrate. The elemental composition analysis with energy-dispersive X-ray spectroscopy will be used to measure material composition of catalysts (metal oxides) or 2D materials (transition metal dichalcogenide crystals) and the results of the plasma treatment (nitridation or doping).

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Rasterelektronenmikroskop mit energiedispersiver Röntgenspektroskopie
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Christian-Albrechts-Universität zu Kiel
• Leader: Professor Jan Benedikt, Ph.D.