Nanoscale Scanning Tip-based Electron Beam Induced Deposition from the Gas-phase for Highly Localized 3D Material Deposition (TEBID)

• Applicant: Professor Dr.-Ing. Steffen Strehle
• Subject Area: Synthesis and Properties of Functional Materials
• Term: since 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 508501791

High-performance patterning techniques for the precise generation of functional 3D nanostructures are of elementary importance for the fabrication of novel micro- and nanosensors up to the realization of the second quantum revolution. In the research project, the fundamental mechanisms of a scanning tip-based electron beam induced deposition (TEBID) from the gas-phase as well as the associated technological requirements and limitations will be elucidated. The aim is to evaluate the potential of this technology in the direction of 3D nanomaterial synthesis and the construction of nanoelectromechanical systems as well as to discuss its future implementation and further development. Based on the experiments on local 3D deposition of carbon nanostructures, the fundamental TEBID influencing parameters that are relevant for a controlled and reproducible 3D deposition will be identified and explored. The used field emitter scanning probes are primarily based on active microcantilevers with diamond modification. In addition to a controlled movement of the field emission scanning probe, the influence of the tip morphology and material, the gas used and the influence of the substrate are investigated in particular in terms of a highly localized 3D deposition. In this context, parasitic influences are also considered. An experimental TEBID setup for use in a scanning electron microscope with gas injection system is planned for the investigations. The investigations will be accompanied by a comprehensive material analysis as well as by simulations. On this basis, an improved understanding of TEBID will be developed, which can be discussed in comparison to the established electron and ion beam induced deposition.

• DFG Programme: Research Grants