Central service project lithography facility (Z01)

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: from 2007 to 2011
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 28586557

No abstract available

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 755: Nanoscale Photonic Imaging
• Major Instrumentation: High resolution e-beam lithography workstation
• Applicant Institution: Georg-August-Universität Göttingen
• Project Head: Professor Dr. Tim Salditt