Scanning electron microscope with focused ion beam, FIB-SEM

• Subject Area: Systems Engineering
• Term: Funded in 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 505067193

The FIB-SEM will be used at the HFU as an integrated facility with universal and versatile nanomanufacturing and nanocharacterization options used for local coating of thin films, structur-ing of materials with a nm-resolution, as well as for analytic characterization with a high resolution in-situ preparation. According to the utilisation concept, the main use is intended to be by 5 professors and their AG The device will be integrated in the already existing processes, es-pecially in Si- and SOI-based microtechnology, where new structuration and coating proce-dures will be investigated, the latter being possible to develop only thanks to the micro- and nanostructuration capabilities offered by a FIB-SEM. By taking benefit of novel local coating and structuration techniques, it will be possible especially to generate micro- and nanosystem prototypes in order to test and demonstrate the reliability of new system principles at the micro- and nanoscale. The investment will expand the preparation facilities in the technology lab for micro- and nanosystems. The structuring at the nm-scale will enable also the realization of metamaterials and will extend the successful research, already begun many years ago in Mescheder’s group, in the field of nanometamaterials using self-organized processes. The characterization possibilities offered by the device will be applied to targeted development of processes (especially for ALD, long-term stable barrier coatings, AG Bucher) and for analysis of new manufacturing processes (additive manufacturing, tool and workpiece & material exam-inations, AG Azarhoushang and Mozaffari). In particular, the research topics porous silicon (PSi) and its applications, flexible electronics and sensors, production technology, molecular diagnose with nanopores (AG Deigner), and material research and development will be sus-tainably reinforced. The research competencies of the applicants meet different scientific fields: system technology (microsystem, biomedical system technology); material science (manufacturing, development and properties of functional and metamaterials); production technology (additive, machining and ablative production technology); as well as bio- and ana-lytical chemistry.The planned investment will support numerous ongoing and future research projects of the involved research groups. Furthermore, the international visibility of the re-search profile of the applicants will be significantly strengthened. Several actual research fields like microelectronics, nanotechnology, optical technology will be addressed and covered with concrete research projects. FIB-SEM will also improve the access of the applicants to national and European programs, and will promote international cooperation opportunities. This research device will also enhance the methodological possibilities for implementation of numerous supervised PhDs (4 of the applicants are already associated to universities).

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Rasterelektronenmikroskop mit fokussiertem Ionenstrahl, FIB-SEM
• Instrumentation Group: 8330 Vakuumbedampfungsanlagen und -präparieranlagen für Elektronenmikroskopie
• Applicant Institution: Hochschule Furtwangen
• Leader: Professor Dr. Ulrich Mescheder