Active Millimeter-Wave On-Wafer Measurement Probe

• Applicants: Professor Dr.-Ing. Dietmar Kissinger; Professor Dr.-Ing. Thomas Zwick
• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: since 2021
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 446397162

The characterization of millimeter-wave integrated circuits (MMICs) requires a highly expensive setup using a network analyzer, frequency extension modules and an on-wafer measurement. The waveguide connecting the on-wafer probe to the extension module, as well as the extension module itself, are significantly limiting factors for the achievable instantaneous frequency range. Hence, a full characterization of a very broadband state-of-the-art MMIC requires an impractical multiple number of measurements with different frequency extension modules and on-wafer probes for the different frequency ranges. In addition, the large size of the extension modules prohibits their use together with probe cards, which includes a high number of probes. This severely limits the development of fast and low-cost verification methods for modern multi-channel radar and communication transceivers.In ActiOnPro we want to explore novel architectures and methodologies for millimeter-wave on-wafer measurement techniques where several frequency extension modules are integrated together with multiplexers into the on-wafer probes. The new architecture will have the following advantages:- Ultra-broad bandwidth from DC to several 100 GHz- No limitation of instantaneous bandwidth by wave-guide bands- Very compact size allowing integration in probe cards or just more flexibility on the probe stationOne very interesting application of the new architecture is to generate a sustainable low-cost extension of an existing DC-110 GHz broadband network analyzer system to DC-220 GHz. In ActiOnPro we will explore the feasibility of the new concept and realize a first demonstration of this DC-220 GHz solution.For this purpose, the latest IHP BiCMOS technology is used to develop frequency extension module circuits consisting of frequency multipliers, mixers, amplifiers and couplers between 110 GHz and 220 GHz. These frequency extension modules are mounted into the probe and all connected to the same probe tip via a multiplexer. In addition, the multiplexer routes low frequency signals from DC to 110 GHz directly to the commercial frequency extension module of the existing vector network analyzer through a 1 mm coax connector. A novel ultra-broadband connector based on coplanar lines will allow replacement of probe tips and thus accommodate the different life time of the probe tip and the rest of the new probe. In parallel to the practical designs a study of the system behavior depending on the number of used frequency bands considering the required chip space, IC performance and the multiplexer’s insertion loss will help to optimize the detailed system architecture. With ActiOnPro all functionalities will be packaged into the probe housing resulting in a compact, fully integrated ultra-broadband on-wafer measurement probe with integrated frequency extension modules.

• DFG Programme: Research Grants