Project Details
Projekt
PVD coating device
Subject Area
Process Engineering, Technical Chemistry
Term
Funded in 2020
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 440899948
The applied research device provides the basis for the investigation of hybrid PVD coating processes based on high-energy plasmas in the form of High Power Pulsed Magnetron Sputtering technology combined with Arc technology. The synergies and potential for the development of new thin film systems with improved tribological properties arising from the simultaneous use of the two process variants represent a promising field of research. This will be investigated by considering the microstructure and phase composition of the thin films up to the real performance of coated tools in manufacturing processes. Consequently, scientific questions in the field of materials technology and application-related fundamental research in production engineering are addressed. On this basis, the coating device offers a multitude of new fields for tribological applications, which at the same time leads to an improvement of the system behavior by using the developed coating systems. In addition to improving the performance of tools, this also includes the friction-optimized and load-adapted synthesis of thin films for components and machine parts to reduce energy consumption and increase the overall performance. Furthermore, core problems of the recycling of sputter materials by new generatively manufactured targets and their application behavior in the coating process are investigated. The applied coating device thus consolidates the pioneering position in the field of plasma-assisted thin-film technology and at the same time strengthens Germany as a place for innovation and production.
DFG Programme
Major Research Instrumentation
Major Instrumentation
PVD-Beschichtungsanlage
Instrumentation Group
8330 Vakuumbedampfungsanlagen und -präparieranlagen für Elektronenmikroskopie
Applicant Institution
Technische Universität Dortmund
