Monolithic co-resonantly coupled sensors

• Applicant: Professorin Dr.-Ing. Julia Körner
• Subject Area: Microsystems ; Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering ; Measurement Systems
• Term: from 2017 to 2018
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 339011641

Co-resonantly coupled oscillating cantilever systems have been successfully applied for cantilever magnetometry and a very high sensitivity has been demonstrated in proof of principle experiments. With these promising results, many different applications are possible (e.g. mass and force sensing, pressure sensors) but beforehand it is necessary to reliably fabricate such sensors with desired parameters. The investigation of the applicability of microfabrication techniques for the production of co-resonantly coupled sensors is the aim of this proposal. Necessary steps are the identification of a suitable material fulfilling the requirements for the co-resonantly coupled set-up, investigation of different microfabrication methods (additive and subtractive) to determine a set of expedient process steps and finally the examination of the sensor parameters. Furthermore, also theoretiscal aspects such as sensor stability, sensitivity and detectivity need to be considered.Once a reliable fabrication process has been established, the sensors shall be implemented and tested for the determination of molecule concentrations by hydrogel. Furthermore, improvements for actuating and detecting of the sensor are a prospective area of research.

• DFG Programme: Research Fellowships
• International Connection: USA
• Host: Professor Dr.-Ing. Florian Solzbacher