Diamond disk micro-electro-mechanical transducers, CDISK

• Applicant: Professor Dr. Oliver Ambacher
• Subject Area: Microsystems ; Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering ; Synthesis and Properties of Functional Materials ; Mechanical Properties of Metallic Materials and their Microstructural Origins
• Term: from 2017 to 2020
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 317885617

Here, we propose a novel approach to achieve high Q-factors for electro-acoustic oscillators. Such systems require low impedance and high tunability, which is compatible with emerging front-end schemes. Within this project, we develop new types of tunable piezo-capacitive micro-electro-mechanical oscillators. The proposed transducers employ A(Sc)N/diamond disk- and ring-resonators; which operate in whispering-gallery and radial-contour vibration modes.

• DFG Programme: Research Grants
• Co-Investigator: Vadim Lebedev, Ph.D.