GRK 2182:  Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas

• Subject Area: Systems Engineering
• Term: since 2017
• Website: Homepage
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 274711337

The semiconductor industry has been following Moore's Law with astonishing consistency for 55 years now. In addition to the constant development of optical lithography, however, more and more alternative nanofabrication technologies are appearing on the scene. Since 2017, the Graduate College GRK 2182 has been successfully working on the scientific and technical foundations for the systematic and consistentapplication of precision engineering and precision metrology strategies and approaches to nanofabrication processes. Methodologically, the aim is to synergistically combine the most powerful AFM tip and laser-based nanofabrication technologies with high-precision, cross-scale 3D nanopositioning and nanometrology. The scientific and technical foundations successfully laid during the first funding period in the project areas A - tip-based nanofabrication, B - laser-based nanofabrication and C - nanofabrication on free-form surfaces, including the cross-cutting topics of theory and metrology, tools and parallelization, and kinematics and control, have proven their potential and are to be consistently continued. The 100 mm Nanofabrication platform, for example, has set new accents in the further development of singlenano digit scanning probe lithography. Within the second funding period, further new nanofabrication techniques, e.g. special additive processes and nanomanipulation techniques, will be investigated with regard to their potential and, in combination with NPM technology, open up new possibilities. A greater focus will be placed on the direct connection between nanofabrication and nanometrology, for example, the iteration of manufacturing and measurement or the realization of new high-precision localized repair processes. In order to round off the research program of the graduate school, the next two generations of doctoral students will focus more on new, innovative applications resulting from the growing possibilities of nanofabrication. The study program and supervision concept have proven to be outstandingly successful. This is proven in particular by the first generation of doctorates, most of which were completed in three years, and is to be consistently continued in this form. This includes the research-oriented courses in the field of nanopositioning and nanometrology and nanofabrication technologies, the intensification of cooperation and interdisciplinarity through an own GRK residence and the orientation towards stays abroad to build up own international networks.

• DFG Programme: Research Training Groups
• Applicant Institution: Technische Universität Ilmenau
• Participating Researchers: Professor Dr.-Ing. Thomas Fröhlich; Professor Dr.-Ing. Roland Füßl; Professor Dr. Thomas Kissinger, since 10/2021; Dr.-Ing. Ingo Ortlepp; Professor Dr.-Ing. Johann Reger; Professor Dr. Stefan Sinzinger; Professor Dr.-Ing. René Theska; Professorin Dr.-Ing. Lena Zentner; Dr. Jens-Peter Zöllner
• Spokespersons: Professor Dr.-Ing. Eberhard Manske, from 4/2017 until 4/2021; Professor Dr.-Ing. Steffen Strehle, since 4/2021