Project Details
Projekt
Highly miniaturised fatigue test platform for thermo-mechanical and reliability characterisation of heterogeneously and bottom-up integrated nanofunctionalised components.
Subject Area
Microsystems
Term
from 2011 to 2019
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 195215523
The objective of TP3 during the second phase of the project is the design, technology development and realization as well as the characterization of a technology-neutral, universal and highly miniaturized fatigue test platform in MEMS technology. This platform will serve for the systematic thermo-mechanical loading of bottom-up heterogeneously integrated nano-functional elements under realistic loads, including the effects of pressure, temperature and humidity. On the MEMS scale, this represents a completely new approach. First, the focus is on DEP self-assembled and micro-positioned CNTs, later other nanowires or nano membrane structures manufactured from Si, BN or Al are of interest.The second phase is consistently aiming at the newly emerging challenges of reliability assessment at the nano scale. To reach this goal, the cooperation with the TP1, 2, 4, 5, 6 and 8 is mandatory.AP1 includes the design for the development of the fatigue testing platform as well as the apparatus of the simulative and experimental methods for reliability assessment. The aim is the consistent integration and purely electrical control and readout of the individual MEMS components into a dynamic mechanical testing device which is capable of applying alternating and subcritical loads. Very important is the involvement of the other TP regarding technological integration, especially regarding the compatibility of the targeted nano-functional elements of the platform, combined with maximum universality of the testing platform itself. Key philosophy here is the "sample centric approach": The testing device may be build, if necessary, as a result of the MEMS processes, around the already assembled test specimen.AP2 bundles in cooperation with TP2, the development of design concepts, the optimization using FE simulation, used for the layout of the MEMS platform, and the integration of multi-scale models of molecular dynamics (TP1) into the design environment foreseen for fatigue analysis and description of failure mechanisms. Particularly important is the consideration of imperfections, such as defects and functional groups, but also the structure-property correlation and its dependence on processing, in particular with respect to interface properties. In addition, concepts for reliability assessment under the given loading conditions have to be developed.AP3 involves the development of technologies for the fatigue testing platform, the integration of the MEMS components and the testing of integrated nano-functional elements, provided by TP5, 6 and 8. In comparison to the 1st phase, more resources for technology development have to be planned, which allows the realization of all planned goals.AP4 aims at the experimental validation of the fatigue testing platform and the thermo-mechanical characterization of nano-functional elements compared to the simulations. Modern failureanalytical techniques, such as FIB, SEM and TEM are used to determine structure-property c.
DFG Programme
Research Units
Subproject of
FOR 1713:
Sensoric Micro- and Nanosystems
