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Dr.-Ing. Bodo Kalkofen

Address Max-Planck-Institut für Mikrostrukturphysik
Department of Nano-Systems from ions, spins and electrons (NISE)
Weinberg 2
06120 Halle

Projects

As Applicant
- Completed projects
  - Atomic layer deposition of dopant source layers for semiconductor doping - Characterization and modelling of drive-in processes (Research Grants)

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