Project Details
Person
Professor Dr.-Ing. Claas Müller
Address
Albert-Ludwigs-Universität Freiburg
Institut für Mikrosystemtechnik (IMTEK)
Georges-Köhler-Allee 103
79110 Freiburg
- As Applicant
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As Leader
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Completed projects
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Plasmabehandlung/beschichtung mit integrierter Metall-/Isolatorbeschichtung (Major Research Instrumentation)
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Maskless Aerosol Deposition Anlage (Major Research Instrumentation)
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Anlage zur elektrophoretischen Funktionsschichtabscheidung (Major Research Instrumentation)
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Completed projects
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As Participating Researcher
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Completed projects
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GRK 1322: Micro Energy Harvesting (Research Training Groups)
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Completed projects
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As Project Head
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Completed projects
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Nanoimprint lithography of single mode waveguides (CRC/Transregios)
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Completed projects
