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Privatdozent Dr. Peter Pichler

Address Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)
Abteilung Bauelemente
Schottkystraße 10
91058 Erlangen

Projects

As Applicant
- Completed projects
  - Atomic layer deposition of dopant source layers for semiconductor doping - Characterization and modelling of drive-in processes (Research Grants)
As Participating Person
- Completed projects
  - Experimentelle Bestimmung der thermodynamischen und kinetischen Eigenschaften von Gitterleerstellen in Silicium (Research Grants)

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