Project Details
Person
Professor Dr.-Ing. Martin Hoffmann
Address
Ruhr-Universität Bochum
Fakultät für Elektrotechnik und Informationstechnik
Lehrstuhl für Mikrosystemtechnik
Universitätsstraße 150
44801 Bochum
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As Applicant
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Current projects
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ADOPT - Adaptive Optics for THz (Priority Programmes)
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Spatial alignment and functional manipulation of droplet-based systems (Priority Programmes)
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Completed projects
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Core facility Micro-Nano-Integration (Core Facilities)
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RF-MEMScomponents, M-systems and hybrid integration (Research Units)
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Core facility Micro-Nano-Integration - follow-up application (Core Facilities)
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Current projects
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As Leader
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Completed projects
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UV-Maskenbelichter (Major Research Instrumentation) -
PVD cluster tool (Major Research Instrumentation)
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UV-Mask- and Bond-Aligner (Major Research Instrumentation)
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Completed projects
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As Project Head
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Current projects
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Passive beam-steering waveguide arrays (CRC/Transregios)
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Completed projects
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Integration of multifunctional nanoanalytic (Collaborative Research Centres)
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Nanotools for NPM-Machines (Collaborative Research Centres)
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Current projects
- As Participating Person
